JPH0386317U - - Google Patents
Info
- Publication number
- JPH0386317U JPH0386317U JP14794389U JP14794389U JPH0386317U JP H0386317 U JPH0386317 U JP H0386317U JP 14794389 U JP14794389 U JP 14794389U JP 14794389 U JP14794389 U JP 14794389U JP H0386317 U JPH0386317 U JP H0386317U
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- scan device
- fulcrum
- electrodes
- thin plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Laser Beam Printer (AREA)
- Mechanical Optical Scanning Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14794389U JPH0386317U (en]) | 1989-12-22 | 1989-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14794389U JPH0386317U (en]) | 1989-12-22 | 1989-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0386317U true JPH0386317U (en]) | 1991-08-30 |
Family
ID=31694413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14794389U Pending JPH0386317U (en]) | 1989-12-22 | 1989-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0386317U (en]) |
-
1989
- 1989-12-22 JP JP14794389U patent/JPH0386317U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| AU688071B2 (en) | Thin film actuated mirror array for use in an optical projection system | |
| US5550680A (en) | Thin film actuated mirror array having an improved optical efficiency | |
| JPH0386317U (en]) | ||
| JP3800288B2 (ja) | 光変調デバイス及び表示装置 | |
| JPH0360311U (en]) | ||
| JPH0453211U (en]) | ||
| JP3800287B2 (ja) | 光変調デバイス及びその製造方法並びに表示装置 | |
| JPH0453213U (en]) | ||
| JPS6410728U (en]) | ||
| JPS60143418U (ja) | 光学走査装置 | |
| JPH0157714U (en]) | ||
| JPS63174318U (en]) | ||
| JPH0352715U (en]) | ||
| JPS63162323U (en]) | ||
| JPS62132514U (en]) | ||
| JP2001004932A (ja) | 光変調デバイス及び表示装置 | |
| JPS63174316U (en]) | ||
| JPS6443320U (en]) | ||
| JPH0347509U (en]) | ||
| JPH02100213U (en]) | ||
| JPH0343620U (en]) | ||
| JPS63153259U (en]) | ||
| JPS62104216U (en]) | ||
| JPS6314230U (en]) | ||
| JPH0389413U (en]) |